发明名称 TURBO-MOLECULAR PUMP
摘要 PURPOSE:To guarantee stress within the limits of yield strength by specifying a relation between the outer diameter of a moving blade and maximum pumping speed. CONSTITUTION:A rotor 2 is arranged in a casing 1, and plural stationary blades 3 are fixedly secured thereon. A relation between outer diameter D0 of a moving blade and maximum pumping speed Smax is selected to satisfy D0=12.3 Smax<0.4>-16.5S0.4<max>. This is calculated by faking into account, conditions such as yield strength of material, for moving blades, exhaust efficiency and passage cross section of gaseous molecules. Accordingly, optimum outer diameter of a moving blade for giving maximum pumping speed with stress of a moving blade held within the limits of yield strength can be obtained.
申请公布号 JPS62225798(A) 申请公布日期 1987.10.03
申请号 JP19860070476 申请日期 1986.03.28
申请人 TOSHIBA CORP 发明人 NONAKA SHIGEO
分类号 F04D19/04 主分类号 F04D19/04
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