| 摘要 |
<p>PURPOSE:To improve throughput as a whole by using one of the transfer feed arms taking out a processed wafer from a processor immediately thereafter the other transfer feed arm inserting its supporting unprocessed wafer into the processor. CONSTITUTION:After a transfer feed arm 30-1 takes out a processed wafer 10 from a processor 60, before the wafer 10 is carried to a predetermined storage part, the other transfer feed arm 30-2 inserts its supporting unprocessed wafer into the processor 60. Consequently, the processor 60 enables a process to be immediately started for this new inserted wafer 10. Accordingly, work for the next replacing operation, in which the transfer feed arm 30-1 once relocates its supporting processed wafer 10 to the storage part successively further supports the next expected unprocessed wafer, can be performed parallelly in time with the processing time by the processor 60.</p> |
