| 摘要 |
PURPOSE: A saw duplexer is provided to improve reliability of an electrode film by suppressing deviation of power durability property due to orientation scattering. CONSTITUTION: A substrate has a piezoelectric surface. An electrode film is formed on the substrate. The electrode film has the first layer composed of Ti or Ti alloy from the bottom, the second layer composed of Al alloy, the third layer composed of elements corresponding to the first layer, and the fourth layer composed of elements corresponding to the second layer. The Al alloy is composed of Al, Cu and Si. |
