发明名称 Transport device for conveying elongate substrates through vacuum coating system, has retainer bar operatively connected to array of substrate holding inserts so that spacing between each insert and substrate can be changed
摘要 <p>A transport device has a rectangular frame defined by longitudinal bars (1) and transverse bars (5,5a), and an array of substrate holding inserts (2) mounted through the openings (11) on the transverse bars. A retainer bar (3), releasably coupled to the longitudinal bars, is operatively connected to the inserts as such that the distance between each insert and the elongate substrate (4) can be selectively increased or decreased. Independent claims are included for the following: (1) a loading and unloading device; and (2) a method for loading and unloading a transport device.</p>
申请公布号 DE102007048758(A1) 申请公布日期 2008.04.17
申请号 DE20071048758 申请日期 2007.10.10
申请人 VON ARDENNE ANLAGENTECHNIK GMBH;XENON AUTOMATISIERUNGSTECHNIK GMBH 发明人 STRUEMPFEL, JOHANNES;BAUER, REINHARDT;HEISIG, ANDREAS;HECHT, HANS-CHRISTIAN;FREITAG, HARTMUT;RICHTER, HEIKO;ULBRICHT, ANDRE;SCHWERDTFEGER, FALK
分类号 C23C14/56 主分类号 C23C14/56
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