发明名称 POLISHING SYSTEM AND METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a polishing system and a method thereof which can perform mass production of a high accurately polished disk by assembling a ring- shaped polishing member rotary type polishing device as a unit of the system. SOLUTION: A magnetic disk D carried from a cassette 201 by a loader 11 of a disk conveyer 1, D, holding it by a chuck 8 of a disk holding device 2, and after positioning it in a polishing position of a polishing device 3, both surfaces of the magnetic disk D are polished by a ring-shaped polishing member rotary type polishing device 3-1, 1-2. After polishing, the existing polished magnetic disk D is carried to a washing device 4 by an unloader 12, to be washed. The existing washed magnetic disk D is carried to a disk holding device 5 by the loader 11, to be positioned in a polishing position of a polishing device 6, both surfaces of the magnetic disk D are polished by a ring-shaped polishing member rotary type polishing device 6-1, 6-2. Thereafter, the magnetic disk D polished by the polishing device 6 is stored in a cassette 211 by the unloader 12.
申请公布号 JPH1119856(A) 申请公布日期 1999.01.26
申请号 JP19970189166 申请日期 1997.06.30
申请人 SPEEDFAM CO LTD 发明人 HARADA MASAO
分类号 B24B7/17;B24B41/06 主分类号 B24B7/17
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