| 摘要 |
PURPOSE:To provide a lightweight, inexpensive and oil-less sliding part having excellent abrasion resistance by subjecting the sliding surface of a graphite substrate part to a plasma polymerization treatment to partially form a carbon hard film thereon. CONSTITUTION:A graphite substrate 1 preliminarily subjected to a machining process, etc., is cleansed and set on a cathode electrode in a vacuum tank of a plasma polymerization device. A preliminarily patterned mask is tightly placed on the substrate 1 so as to partially form films thereon. The vacuum tank is evacuated and methane gas is charged to the vacuum tank from a gas inlet. A high frequency electric power is applied to a cathode electrode to form carbon hard films 4 on a cathode substrate 1. The substrate 1 is taken out fromthe vacuum tank and the pattern mask is removed. The exposed stripe graphite parts 2 of the substrate 1 are impregnated with a lubricant 3 to prepare the objective sliding part. |
