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发明名称
SEMICONDUCTOR DEVICE FABRICATION APPARATUS WITH HANDLERS
摘要
申请公布号
KR0168808(B1)
申请公布日期
1999.02.01
申请号
KR19950067543
申请日期
1995.12.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SONG, BYUNG-SOO;YU, CHAN-ILL
分类号
H01L21/285;H01L21/205;H01L21/677;H01L21/68;(IPC1-7):H01L21/205
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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