| 摘要 |
PROBLEM TO BE SOLVED: To provide an adaptor device by when, even when electrodes, to be inspected, of a circuit device as an object to be inspected are complicated patterns whose electrode pitch is very small and fine and whose density is high, their required electric connection can be achieved surely regarding the circuit device, by which their good electric connection state is maintained stably even with reference to a change in an environment such as a thermal hysteresis or the like due to a temperature change and in which their connection reliability is high. SOLUTION: An adaptor device for circuit-device inspection is interposed between a circuit device as an object to be inspected and an electric inspection apparatus, and it electrically connects the electrode, to be inspected, of the circuit device to the electric inspection apparatus. At this time, the adaptor device is provided with an insulating board 10, with a terminal electrode 20 which is installed on the surface of the insulating board 10 and which is connected to the electric inspection apparatus and with a metal contact part 31 which is connected electrically to the terminal electrode 20 and which is exposed on the rear surface of the insulating board 10. The adaptor device is provided with an electrode 30, for connection, which is arranged so as to correspond to the electrode, to be inspected, of the circuit device as the object to be inspected. The electrode 30 for connection is elastic. As a result, the electrode 30 for connection can be connected directly to the electrode, to be inspected, of the circuit device as the object to be inspected. |
