Glass formation on a semi-conductor wafer,申请号EP19980310017-传众专利搜索

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发明名称	Glass formation on a semi-conductor wafer
摘要
申请公布号	EP0932188(A3)	申请公布日期	1999.11.17
申请号	EP19980310017	申请日期	1998.12.07
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;SIEMENS AKTIENGESELLSCHAFT;LAM RESEARCH CORPORATION	发明人	KIRCHHOF, MARKUS;CHAKRAVARTI, ASHIMA;ILG, MATTHIAS;MCKINLEY, KEVIN A.;NGUYEN, SON V.;SHAPIRO, MICHAEL J.
分类号	H01L21/31;C23C16/40;H01L21/316;(IPC1-7):H01L21/316;H01L21/310	主分类号	H01L21/31
代理机构		代理人
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