| 摘要 |
PROBLEM TO BE SOLVED: To prevent an optical switch from malfunctioning due to leak current and varying in a optical characteristic while miniaturizing an optical switch, facilitating production, reducing power consumption, and improved a power efficiency. SOLUTION: In an optical waveguide substrate 15, electric wiring 4a, 4b connect end parts of electric heaters 5 on the same sides with each other, which are arranged in the direction of row of the crossing parts of optical waveguides 3a, 3b arrayed in a matrix form. Upper layer electric wiring 7 connect the electric heaters 5 with each other, which are arranged in the columnar direction of the above crossing parts arrayed in a matrix form, via vertical electric wiring connection bodies 6. An insulating layer 8 insulates the electric wiring 4a, 4b from the electric wiring 7 so that they are not directly connected between them. In a substrate 11, a bypass conduit 12 makes one end of a slit 9 communicate with the other end. A both end open conduit 13 is formed between adjacent elements along the direction of row of the elements, and makes the both ends communicate with the outside. One end of a connection conduit 14 communicates with a slit 9 of each element, the other end communicates with the nearest part to the slit 9 of the both end open conduit 13. |
