发明名称 材料を蒸着するための製造装置及び当該装置において使用される電極
摘要 An electrode for use with a manufacturing apparatus to deposit a material onto a carrier body with the carrier body having a first end and a second end spaced from each other with a socket disposed at each end of the carrier body. The electrode includes a shaft having a first end and a second end. The electrode also includes a head disposed on one of the ends of the shaft for coupling with the socket. The shaft and the head have an exterior surface having a contact region adapted to contact the socket. The electrode further includes an exterior surface and an exterior coating disposed on the exterior surface outside of the contact region, the exterior coating having an electrical conductivity of at least 9×106 Siemens/meter and corrosion resistance higher than silver in a galvanic series based upon room temperature sea water as an electrolyte.
申请公布号 JP5959198(B2) 申请公布日期 2016.08.02
申请号 JP20110505007 申请日期 2009.04.13
申请人 ヘムロック・セミコンダクター・コーポレーション 发明人 ヒラブランド,デイヴィッド;ナップ,セオドアー
分类号 C23C16/44;C01B33/035;H05B3/00;H05B3/03 主分类号 C23C16/44
代理机构 代理人
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