发明名称 |
CHEMICALLY GROWING FURNACE IN GAS PHASE |
摘要 |
PURPOSE:To prevent carbon powder formed by the friction between a substratum heater and a ring shaped supporter both made of carbon from flying above the heater by setting up a looped plate eave which is coaxial with the substratum heater at the side of the rotating substratum heater in a chemically growing furnace of vertical type. |
申请公布号 |
JPS5360382(A) |
申请公布日期 |
1978.05.30 |
申请号 |
JP19760135782 |
申请日期 |
1976.11.10 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
NISHIMOTO AKIRA;MIYOSHI HIROKAZU |
分类号 |
C23C16/46;C23C14/54;H01L21/205 |
主分类号 |
C23C16/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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