| 摘要 |
PURPOSE:To prevent volatile substance in a vaporing container from being extruded to gas inlet side of a gas tube by a method wherein the gas tube at gas inlet side is connected with a gas tube at gas outlet side by a by-pass tube and a pressure leak valve is provided to the by-pass tube. CONSTITUTION:In a vapor growth apparatus, a by-pass tube 17 connecting a gas tube 5 at gas inlet side with a gas tube 7 at gas outlet side, and a pressure-control leak valve 18, which is opened at the time when pressure in the gas tube 7 is raised more highly than the pressure in the gas tube 5, are furnished. Accordingly, in case that the pressure in the gas tube 7 is raised and becomes higher than the pressure in the gas tube 5, the valve 18 is opened and the carrier in the gas tube 7 flows to the gas tube 5 until the pressure of both tubes become equal. As the result, it is prevented that the volatile substance 1 is pushed out and flowed to the gas tube 5. In consequence, unprecise supply of the substance 1 or hazardousness of spontaneous injection of an organometal in the substance 1 can be eliminated. |
