发明名称 PRODUCTION OF GRAPHITE BASE MATERIAL FOR BETA-SILICON CARBIDE MOLDED PRODUCT AND GRAPHITE BASE MATERIAL FOR BETA-SILICON CARBIDE MOLDED PRODUCT AND BETA-SILICON CARBIDE MOLDED PRODUCT
摘要 PROBLEM TO BE SOLVED: To provide a graphite base material of raw material optimal for obtaining substantially 100% SiC molded product by the performance of a CVR method, to provide a method for producing the graphite base material, enabling the efficient production of the graphite base material, and to provide an extremely highly pure SiC molded product capable of being sufficiently applied as a raw material for the field of semiconductors. SOLUTION: This method for producing a graphite base material for &beta;-SiC molded products comprises grinding a raw material for the graphite base material, kneading the ground product, molding the kneaded product, calcining the molded product and subsequently graphitizing the calcined product. Therein, the raw material for the graphite base material is thermally treated at a high temperature (>=2,000 deg.C), ground, classified into a fraction having particle diameters of at least 3-100 &mu;m, and subsequently kneaded. Thus, the &beta;-silicon carbide molded product having a bulk density of <=1.50 Mg/m<3> , an average pore radius of >=1.5 &mu;m, a true density of <=1.8 &mu;m is obtained. The obtained graphite base material is treated by a CVR method to obtain the SiC molded product, which has impurity concentrations (Fe, Al concentrations) comprising a Fe concentration of <=0.5 ppm and an Al concentration of <=0.1 ppm and has an ash of <=10 ppm.
申请公布号 JPH11116344(A) 申请公布日期 1999.04.27
申请号 JP19970285728 申请日期 1997.10.17
申请人 TOYO TANSO KK 发明人 TOJO JUN;UKITA SHIGEYUKI;AKIYAMA MOTOAKI
分类号 C04B35/626;C01B31/04;C04B35/573;H01L21/68;H01L21/683 主分类号 C04B35/626
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