| 摘要 |
The substrate (15) is exchangeably secured in the holder (22), which can be rotated about an axis vertical to the processed substrate surface. A cover (12) is movable with respect to the substrate holder. There are two vacuum applicators, effective between the substrate and holder and for evacuating, or gas filling, the space between the substrate holder and cover. The first vacuum applicator (42) is guided by a drive motor (33) under the substrate holder, while the second vacuum applicator (43) is coupled to the cover.
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