| 摘要 |
PURPOSE: A thin film actuated mirror array and a method for fabricating the same are to prevent the short-circuit from being generated between an upper electrode and a lower electrode by the crack of a deformation layer. CONSTITUTION: An active matrix(100) has an MxN transistor provided therein and a drain pad extended from the drain of the transistor. An actuator(200) is formed on the active matrix. The actuator includes an anchor(135a,135b), a supporting layer(140) formed on the anchors, a lower electrode(145) formed on the supporting layer, a deformation layer(150) formed on the lower electrode, and an upper electrode(155) formed on the deformation layer. A buried layer(170) is formed on the anchors of the actuator. An upper electrode connecting member(175) is formed on the upper electrode and the buried layer. A mirror is formed on the supporting layer. The buried layer consists of oxide, and has the height equal to the surface of the upper electrode.
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