MANUFACTURING METHOD OF OPTICAL DEVICE INCLUDING SHIELDING BODY AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To accurately manufacture a shielding body of an optical device having excellent shielding characteristics at a low cost.SOLUTION: The manufacturing method of an optical device including a shielding body 23A includes the steps of: forming a metal layer 21 on a substrate (silicon substrate) 2, on which a recess part 2a is formed; forming a catalyst adsorption layer 22 on a surface of the substrate and on an inner surface of the recess part 2a; and forming a plating layer 23 of Co or a Co alloy by applying electroless plating on the catalyst adsorption layer 22.SELECTED DRAWING: Figure 2