| 摘要 |
PROBLEM TO BE SOLVED: To provide a REMA-blade stage mechanism supporting guided motion of a REMA blade in high-vacuum environment, in addition, supporting several degrees of freedom of the motion. SOLUTION: The mechanism has a REMA (reticle-masking) blade system including a REMA blade, a REMA-blade carriage assembly, a set of electromagnetic-force actuators, an electromagnetic linear motor, a sensor set, and a servo mechanism. COPYRIGHT: (C)2005,JPO&NCIPI
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