| 摘要 |
PROBLEM TO BE SOLVED: To increase convenience of a cell where an object is stored.SOLUTION: An object storage cell comprises: a first substrate having a first opening; a second substrate which is arranged so as to face the first substrate and has a second opening facing the first opening; a first thin film for closing a second substrate side of the first opening; and a second thin film for closing a first substrate side of the second opening. An observation space and a flow path space are arranged between the first substrate and the second substrate. The observation space where an object is placed is arranged between the first thin film and the second thin film. The flow path space connects the observation space and an external space. The first thin film has a laminate structure including at least a first layer at the first substrate side and a second layer at a side of the observation space. At least one of the first substrate and the second substrate has transparency with respect to visible light rays. The first thin film and the second thin film have transparency with respect to electron beams.SELECTED DRAWING: Figure 3 |
