Electrically controlled optical fuse and method of fabrication

摘要

Embodiments of the present invention provide an electrically controlled optical fuse. The optical fuse is activated electronically instead of by the light source itself. An applied voltage causes the fuse temperature to rise, which induces a transformation of a phase changing material from transparent to opaque. A gettering layer absorbs excess atoms released during the transformation.

主权项

1. A method of fabricating an optical fuse, comprising:
depositing a metal region on a light sensor substrate; forming a cavity in the metal region to expose a portion of the light sensor substrate; depositing a gettering layer on the metal region; filling the cavity with a phase changing material; planarizing to the metal region; depositing a light source substrate on the metal region, whereby the phase changing material is in an optical path between the light sensor substrate and the light source substrate; and forming a plurality of contacts in the metal region.