| 发明名称 |
Substrate support pillar alignment technique |
| 摘要 |
The upper mobile section has measurement detectors measuring alignment with the pillars. The template can be re-oriented to align with the upper section substrate once lowered onto the pillars.
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| 申请公布号 |
FR2775540(A1) |
申请公布日期 |
1999.09.03 |
| 申请号 |
FR19990002149 |
申请日期 |
1999.02.22 |
| 申请人 |
FUTABA DENSHI KOGYO KABUSHIKI KAISHA |
发明人 |
MAKITA YOSHIO;TAKASHIMA NOBUHIKO;OZAWA KATUNOSUKE;YAMAURA TATSUO;YOSHIKATA SATOSHI;ITAKURA MASAYUKI |
| 分类号 |
H01J9/24;H01J9/18;(IPC1-7):H01J29/02 |
主分类号 |
H01J9/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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