| 摘要 |
PURPOSE:To stably produce the optical waveguide having consistent quality by preventing the nonuniformity in a diffused state of H<+> and the local adhesion and diffusion of impurities in the proton exchange stage for forming the optical waveguide, and decreasing the variations in the insertion loss of the optical waveguide. CONSTITUTION:The optical wveguide is formed in a substrate material consisting of an electrooptical crystal by dynamically bringing a material 21, which is to be treated and includes the substrate material, into contact with a heated liquid acid 18. The material 21 to be treated is rotated or shaken volatively to the acid 18 in the state of immersing the material 21 to be treated in the acid 18. The material 21 to be treated is rotated or shaken or the liquid acid 18 is rotated or shaken velatively to the material 21 to be treated by stirring the acid. |
