| 摘要 |
A probe array for a scanning microscope has numerous individual probes that respectively have a probe tip on one or more beams. The individual probes are arranged in the form of a two-dimensional grid such that the directions of the beams include with respect to the directions of the grid an angle which is not equal to 0 DEG or 180 DEG . The grid spacings in both mutually perpendicular directions can be smaller than the length of the beams, due to the inclined arrangement of the beams relative to the translation vectors of the grid formed by the probe tips (3a-3p). The two beams (4a, 5a) of each individual probe are mutually arranged in a V-shape to form a mutually nested arrangement of the individual probes.
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