| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transmission type electron microscope equipped with an X-ray spectroscope having high resolution with a compact optical system. SOLUTION: The transmission type electron microscope (1) is constituted by an X-ray spectroscope (10) having a spectroscope chamber (11) with which a back irradiation type CCD detector (14) is attached in an end part via a bellows (13), while being evacuated by a vacuum pump and arranged with a non-equally-pitched grating (12), is attached in the main tube (2) through a gate valve (4). The characteristic soft X-ray emitted from a specimen irradiated with an electron beam, is made to be obliquely incident with a large angle relative to the normal of a non-equally-pitched grating surface, and the diffracted X-ray is detected by the back irradiation type CCD detector.</p> |
