发明名称 Method And Apparatus For Manufacturing Superconducting Tape Through Integrated Process
摘要 A method and apparatus for manufacturing superconducting tape through an integrated process, including the steps of: heat-treating a substrate wound on a drum in a reaction chamber; continuously depositing components, constituting a buffer layer, a superconducting layer, a contact resistance layer, and a protective layer of the superconducting tape, which are supplied from a deposition chamber, on the substrate; and heat-treating the substrate deposited with the components. The present invention is advantageous in that the unit cost and time for manufacturing a superconducting tape are decreased because all processes for manufacturing a superconducting tape can be performed under the same conditions, the uniformity and performance of a superconducting tape is improved because the same deposition conditions are applied to all of the process for manufacturing a superconducting tape, and a high-quality superconducting tape having high deposition efficiency can be obtained because specific components can be deposited on a large-sized substrate using a drum.
申请公布号 US2008220976(A1) 申请公布日期 2008.09.11
申请号 US20070863251 申请日期 2007.09.28
申请人 KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE 发明人 KIM HO SUP;OH SANG SOO;HA HONG SOO;SONG KYU JUNG;HA DONG WOO;KO ROCK KIL
分类号 H01L39/24 主分类号 H01L39/24
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