LAMP DRIVER FOR LOW PRESSURE ENVIRONMENT

摘要

Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.

主权项

1. A lamp driver, comprising:
a power source; at least two direct current to direct current converters, each direct current to direct current converter connected with the power source in series; and a direct connection between the at least two direct current to direct current converters, wherein the direct connection is attachable to a reference voltage.