| 摘要 |
1,246,810. Polymerization from a discharge plasma. SUSUMU INDUSTRIAL CO. Ltd. 18 Sept., 1968 [19 Sept., 1967 (2); 8 Nov., 1967], No. 44255/68. Heading C3P. [Also in Division H1] Thin films of organic polymers are prepared by subjecting monomers capable of forming a cross-linked polymer to a discharge plasma in the vapour phase and depositing the polymer thus produced on to a stationary substrate, separate from the electrodes and positioned in the area where the plasma is generated. In the example suitably masked bodies were placed in a glow discharge reaction tube, the pressure was reduced, styrene and divinyl benzene vapours were introduced and a copolymer of these monomers was deposited on the bodies by creating a plasma by applying a high-frequency power supply. The thin film may be the insulating film for the gate electrodes of a field effect transistor or the dielectric substance of a transistor. |
