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发明名称
METHOD FOR EVALUATING ALIGNMENT RESULT AND ALIGNMENT EQUIPMENT USING THE METHOD
摘要
申请公布号
JPH08321452(A)
申请公布日期
1996.12.03
申请号
JP19950127921
申请日期
1995.05.26
申请人
NIKON CORP
发明人
OTA KAZUYA
分类号
G01B11/00;G01J9/00;G03F9/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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