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发明名称
Metal carbonyl vapour deposition apparatus and process
摘要
申请公布号
AU2005202460(A1)
申请公布日期
2006.12.21
申请号
AU20050202460
申请日期
2005.06.06
申请人
CHEMICAL VAPOUR METAL REFINING INC
发明人
KAMRAN M. KHOZAN;MOHAMMAD AL QUAYYUM;DMITRI S. TEREKHOV
分类号
C23C16/16;C23C16/48
主分类号
C23C16/16
代理机构
代理人
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地址
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