| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate for optical waveguides which can perform high resolution core patterning, and to provide a manufacturing method of an optical waveguide using the substrate for an optical waveguide. <P>SOLUTION: Disclosed is the manufacturing method of the optical waveguide in which the core 16 for guiding light and a clad 13 with the core 16 embedded therein are formed, and the method is characterized in that the core 16 is created by arranging a photo-mask 18 on a protective layer 17 of a photosensitive dry film 1 including a photosensitive resin layer 14 for creating the core 16 and the protective layer 17 containing a resin having solubility in a developing solution on the photosensitive resin layer 14 on the clad 13 formed on the substrate 11, irradiating it with light, and developing it with the developing solution. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
