| 摘要 |
An overhead transportation system is provided to prevent a buffer from interfere layout change of a clean room by folding the buffer upward while a processing device is drawn in and out. An overhead transportation system includes a transporter, a track(4), a column(5), a side buffer(30), and an under buffer(50). The transporter is coupled to the track and includes a lateral drive, a theta drive, a lift drive, a lifting unit, and a cover. The lateral drive moves the theta drive, the lift drive, and the lifting unit vertically to the column. The theta drive moves the lift drive and the lifting unit horizontally. The lift drive lifts the lifting unit up and down. The cover prevents a material such as a cassette from falling down the transporter and supports a flange of the cassette. The track is coupled to a ceiling through the column. The side buffer is installed beside the track and supports the under buffer. The under buffer is arranged below the transporter not interfering the transporter.
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