| 摘要 |
The present invention relates to a method for fabricating geometrically controlled carbon coils. The method or fabricating geometrically controlled carbon coils comprises the steps of: 1) installing a ceramic substrate in a chemical vapor deposition device and injecting at least one gas selected from C_2H_2 gas and SF_6 gas while injecting H_2 gas; 2) stopping injecting of the selected at least one gas while injecting H_2 gas and injecting the other gas not selected in step 1; 3) repeating step 1 and step 2 alternately in an alternate injection number of 2-12; and 3) injecting H_2 gas and C_2H_2 gas after the completion of step 3. |
