APPARATUS FOR MEASURING TEMPERATURE OF POWER DEVICE USING PIEZOELECTRIC DEVICE

摘要

According to an embodiment of the present invention, an apparatus to measure a temperature of a power device using a piezoelectric device comprises: a substrate; one or more power devices formed on one surface of the substrate; and one or more piezoelectric devices arranged on the substrate to be separated from the power devices, measuring the thermal stress generated in the substrate to sense a temperature when the power devices are heated.