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发明名称
Trench etching process
摘要
申请公布号
US5030316(A)
申请公布日期
1991.07.09
申请号
US19900462959
申请日期
1990.01.08
申请人
FUJITSU LIMITED
发明人
MOTOYAMA, TAKUSHI;ABE, NAOMICHI;MIHARA, SATORU
分类号
H01L21/302;H01L21/3065;H01L21/308
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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