| 摘要 |
PROBLEM TO BE SOLVED: To reduce fluctuation in attenuation of X-ray to a lowest level so that generation of artifact in a visible image may be minimized. SOLUTION: An X-ray detector 23 for an automatic irradiation control system has a substrate 40 of carbon composite. On a main surface of the substrate 40 a first layer made of a conductive material 42 is formed. On the first layer 42 a second layer 44 made of a uniform semiconductor material such as CsTe, CdZnTe or amorphous silicon is deposited. The electric characteristic such as the conduction ratio of the second layer 44 varies in response to the collision of X-ray. On the surface of the semiconductor layer 44 a third layer made of a conductive material 46 is formed. The third layer 46 is divided into several electrode elements 47, 47. The elements 47, 48 define several regions in the semiconductor layer 44. By detecting the conduction ratio between the first layer 42 and the respective elements 47, 48, the intensity of X-ray colliding in different regions can be measured.
|
