| 摘要 |
PROBLEM TO BE SOLVED: To improve the reproducibility and accuracy of a spectrophotometer, and miniaturize the device, by providing a light source system, a spectrometer, a measuring optical system, a gas guide system, and an exhaust system, setting the oxygen partial pressure in the spectrophotometer for ultraviolet region to a specific range, or setting the oxygen concentration to a specific concentration or below. SOLUTION: The light emitted from a light source 1 is converged by a converging lens 2 and spectrally diffracted by a spectrometer 3, then it is separated into measurement light and reference light by the first chopper 7. The reference light passes through a reference 9 and is detected by a photomultiplier 15 via a mirror 10 and the second chopper 13. The measurement light passes through a sample 11 and is detected by the photomultiplier 15 via a mirror 12 and the second chopper 13. The oxygen partial pressure in a spectrophotometer for an ultraviolet region is set to 7.6×10<-2> Torr, or the oxygen concentration is set to 0.01% or below. A gas substitution is made by inactive gas (e.g. helium gas), nitrogen gas, or mixed gas of them having a purity of 99.99% or above. A gas guide port 16 and a gas exhaust port 17 for the gas substitution are provided at the upper section and lower section of the side face of the device respectively.
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