发明名称 |
Processing apparatus |
摘要 |
<p>The present inventions provides a processing apparatus to enable a plurality of processing sections to be installed in a smaller space. The apparatus has a plurality of processing sections arranged at up-down two stages and supplies a material from a processing section situated at one end of either one of an upper or a lower stage. The material is processed at the processing section at one of the upper stage or lower stage and then processed at the other processing section. And it is processed at the processing section situated at one end of the other and collected. <IMAGE></p> |
申请公布号 |
EP0957510(A1) |
申请公布日期 |
1999.11.17 |
申请号 |
EP19970909596 |
申请日期 |
1997.10.23 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION |
发明人 |
MIYASAKO, HISAAKI |
分类号 |
H01L21/677;B65G49/06;B65G49/07;H01L21/00;H01L21/304;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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