| 摘要 |
PROBLEM TO BE SOLVED: To realize a positioning device capable of ensuring a precise positioning by use of an inexpensive mirror without requiring the positioning of a precise flat mirror. SOLUTION: In this positioning device, a slider floated on a platen by compressed air is moved, the position of the slider is detected by a laser interferometer, and the slider is positioned based on the deviation between the detected position and a position command value. The precise flat mirror is loaded on the slider in calibration, and how much the position of the slider detected by use of the flat mirror is shifted from the position command value is calculated to determined the correction value to correct the slippage. In a general positioning operation, the precise flat mirror is removed, and the position command value is corrected with the correction value determined in calibration.
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