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经营范围
发明名称
Reinigung von Siliziumtetrachlorid.
摘要
申请公布号
DE69102980(D1)
申请公布日期
1994.08.25
申请号
DE19916002980
申请日期
1991.11.29
申请人
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP
发明人
OGIHARA, TSUTOMU, JOUETSU-SHI, NIIGATA-KEN, JP;SHIMIZU, TAKAAKI, JOUETSU-SHI, NIIGATA-KEN, JP;NARUSE, MASAHIKO, JOUETSU-SHI, NIIGATA-KEN, JP
分类号
C01B33/107;(IPC1-7):C01B33/107
主分类号
C01B33/107
代理机构
代理人
主权项
地址
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