发明名称 CERAMIC HEATER AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater of which, the temperature of a heating surface is uniform, preventing the generation of disconnection caused by the heat generated at a heating resistor, or repeated rise and fall of the temperature. SOLUTION: For the manufacturing method of the ceramic heater, the resistance of a heating resistor is controlled by forming a notch on a heating resistor formed on a ceramic base board by irradiation of laser beam. The direction of the notch is approximately parallel with the current flowing direction, and the notch is formed so that the notch formed part is constructed by only one current flow path.
申请公布号 JP2002203666(A) 申请公布日期 2002.07.19
申请号 JP20000402864 申请日期 2000.12.28
申请人 IBIDEN CO LTD 发明人 NOMURA KAZUKI
分类号 H05B3/20;H01L21/027;H01L21/66;H05B3/10;(IPC1-7):H05B3/20 主分类号 H05B3/20
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