| 摘要 |
In a method for making a stainless steel reinforced belt pad for linear chemical mechanical planarization (CMP), a stainless steel band is disposed around an inner mold having positioners configured to hold the stainless steel band in place during a molding process. Once the stainless steel band is disposed around the inner mold, pad material is injected into the gap defined between the outer mold and the stainless steel band. An inner mold for making a stainless steel reinforced belt pad for linear CMP includes a cylindrical body and a plurality of positioners affixed to the cylindrical body. The plurality of positioners is arranged so as to hold a stainless steel band disposed around the cylindrical body in place during a molding process. By way of example, suitable positioners include spring-loaded ball plungers.
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