发明名称 |
Method and apparatus for manufacturing single-crystal ingot |
摘要 |
There are provided a system for manufacturing a single-crystal ingot which is equipped with a cooler for cooling the single-crystal ingot being pulled and is capable of forming a tail without involvement of excessive heating of a crucible, as well as to a method for controlling the system. In a system for manufacturing a single-crystal ingot having a cooler for cooling a single-crystal ingot which is being pulled from molten raw material (called a single-crystal pulled ingot), when a tail of the single-crystal pulled ingot is formed, the cooler is moved away from the solid/melt interface between the single-crystal ingot and the molten raw material, to thereby reduce the power dissipated by the system. In the system, the cooler is moved upward after the end of a product area of the single-crystal ingot has been cooled until it passes through a grown-in defect temperature range.
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申请公布号 |
US6858076(B1) |
申请公布日期 |
2005.02.22 |
申请号 |
US20000569086 |
申请日期 |
2000.05.10 |
申请人 |
KOMATSU ELECTRONIC METALS CO., LTD. |
发明人 |
NAKAJIMA HIROTAKA;KOTOOKA TOSHIROU;SHIMANUKI YOSHIYUKI;INAGAKI HIROSHI;KAWASHIMA SHIGEKI;KAMOGAWA MAKOTO |
分类号 |
C30B15/14;C30B29/06;(IPC1-7):C30B13/30 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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