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发明名称
SEMICONDUCTOR DEVICE AND PRODUCTION METHOD
摘要
申请公布号
JPH04261024(A)
申请公布日期
1992.09.17
申请号
JP19910005024
申请日期
1991.01.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORITA ISAO
分类号
H01L21/3213;H01L21/027;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L21/3213
代理机构
代理人
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地址
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