发明名称 |
APPARATUS AND METHOD OF DETECTING DISCHARGING-EMERGENCY FOR WIREBONDING DEVICE |
摘要 |
<p>A device and method is available for detecting abnormalities of an electric discharge generated for forming a ball at the end of a bonding wire in a bonding apparatus. A high voltage is applied across the bonding wire and an electrode, and the maximum value of the applied high voltage is detected and sent, via a peak hold circuit, to a computer that compares the maximum high voltage with an insulation breakdown voltage of a normal detection range and calculates a gap between the end of the bonding wire and the electrode, thus determining the discharge abnormalities based upon the result of the calculation of the gap.</p> |
申请公布号 |
KR100258428(B1) |
申请公布日期 |
2000.06.01 |
申请号 |
KR19970059438 |
申请日期 |
1997.11.12 |
申请人 |
KABUSHIKI KAISHA SHINKAWA |
发明人 |
SASAKURA, KAZUMASA;TERAKADO, YOSHIMITSU |
分类号 |
H01L21/60;B23K20/00;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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