发明名称 NOVOLAC POLYMER PLANARIZATION FILMS FOR MICROELECTRONIC STRUCTURES
摘要 <p>An improved method for forming planarization films which remain adhered to substrates upon exposure to heat comprising first applying a polymeric solution containing a low molecular weight novolac resin, a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof, and an optional organic solvent to a substrate, followed by heating the substrate.</p>
申请公布号 KR100252579(B1) 申请公布日期 2000.06.01
申请号 KR19977000031 申请日期 1997.01.06
申请人 ALLIEDSIGNAL INCORPORATED 发明人 DRAGE, JAMES STEVEN
分类号 C08G8/10;C08G8/00;C08L61/06;C09D161/04;C09D161/06;H01L21/312;(IPC1-7):H01L21/027 主分类号 C08G8/10
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