| 发明名称 |
NON CONTACT METHOD AND APPARATUS FOR MEASUREMENT OF SHEET RESISTANCE OF P-N JUNCTIONS |
| 摘要 |
<p>A contactless sheet resistance measurement apparatus and method for measuring the sheet resistance of upper layer of ultra shallow p-n junction including an alternating light source (9) optically coupled with first transparent and conducting electrode (14) brought close to the wafer (3), the second electrode (16) placed outside of illumination area. Using the measurement of the surface photovoltage signals inside illuminated area and outside this area and its phase shifts, linear SPV model describing its lateral distribution the sheet resistance and p-n junction conductance is determined.</p> |
| 申请公布号 |
WO2006062510(A1) |
申请公布日期 |
2006.06.15 |
| 申请号 |
WO2004US40905 |
申请日期 |
2004.12.07 |
| 申请人 |
AHBEE 2, LP;VAN, PHUC;FAIFER, VLADIMIR |
发明人 |
VAN, PHUC;FAIFER, VLADIMIR |
| 分类号 |
G01R27/00 |
主分类号 |
G01R27/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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