PROBE TEST APPARATUS OF FLAT PANNEL DISPLAY

摘要

A probe test apparatus of a flat panel display device is provided to inspect electrical characteristics of a thin film transistor without an influence of noise by using linear type DC power instead of AC power. A glass is loaded on a stage. A reference temperature measurement point is formed on a non-loading region of the stage. A probe pin pixel is electrically connected to electrodes and pads formed on the glass in order to measure characteristics of a transistor. A probe head supports mechanically the probe pin and is moved to an X-axis and a Y-axis so that the probe pin comes in contact with the pixel electrodes and pads. A plurality of linear motors transfer the probe head to the X-axis and the Y-axis. A fan is attached to one side of the probe head to supply hot wind and cold wind to contact points among the probe pin, the pixel electrodes and the pads. A power supply unit(150) supplies the power to the fan in order to operate the fan. An air control unit(300) controls compressed air. A control unit(200) controls operations for supplying the power or the compressed air to the fan. A reference temperature measurement unit(140) measures temperature at a reference temperature measuring point.