发明名称 Digital control method and apparatus for rotary member supported by magnetic bearing
摘要 <p>A method of controlling the axis S of a rotary member 1 is disclosed which comprises the steps of: (a) sampling an inclined angleθand it's rate dθ/dt of the rotary member; (b) in response to the angleθand rate dθ/dt, analytically determining an assumed inclined angle motion of the rotary member at the end of each sampling period T when no control torque is applied to the axis during the sampling period; (c) dividing the assumed inclined angle motion into low and high frequency mode components; (d) determining rotational vectors Sp and Sn of the mode components in a free conical motion; (e) determining rotational vectors of the divided mode components in a forced conical motion at the end of the sampling period, provided that an unknown constant control torque u(k) is virtually applied to the axis during one sampling period, but no free conical motion exists; (f) adding the rotational vectors in the free and forced conical motions for each of mode components; (g) determining the direction and magnitude of the unknown control torque u(k) for each of mode components so as to reduce the rotational vectors of the free conical motion; and (h) applying each of the determined control torques or the added control torque to the axis by control coils.</p>
申请公布号 EP0698745(A2) 申请公布日期 1996.02.28
申请号 EP19950113129 申请日期 1995.08.21
申请人 EBARA CORPORATION 发明人 MURAKAMI, CHIKARA
分类号 F16C32/04;F16C39/06;G05D3/12;(IPC1-7):F16C39/06 主分类号 F16C32/04
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