| 摘要 |
PURPOSE: A chemical mixing vessel and supply apparatus for manufacturing a semiconductor device which simplifies a structure of a device for mixing a supplying chemicals and reduces an installing area, and simultaneously mixing and supplying the chemicals are provided. CONSTITUTION: The chemical mixing supply apparatus for manufacturing a semiconductor device, the apparatus comprising: a chemical supply portion including a plurality of storing tubs(12, 14, 16, 30, 34) for storing different chemicals, and a pump connected to the plurality of storing tubs(12, 14, 16, 30, 34) through a pipe for pumping the chemicals; a chemical mixing vessel(10) connected to the chemical supply portion for receiving the different chemicals, and having a plurality of layers, wherein a slanted face is formed inside the chemical mixing vessel(10); and an intermediate storing tube(38) connected to the chemical mixing vessel(10) for supplying the mixed chemicals to a predetermined device.
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