发明名称 Dipole illumination
摘要 A system for fabricating patterns on a semiconductor, the system includes a first aperture having two openings aligned in a first axis, a first mask, a second aperture having two openings aligned in a second axis, and a second mask. The system may be implemented with the second axis substantially perpendicular to the first axis.
申请公布号 US7033734(B2) 申请公布日期 2006.04.25
申请号 US20030377056 申请日期 2003.02.28
申请人 INTEL CORPORATION 发明人 CHANDHOK MANISH
分类号 G03B27/54;G03F7/20 主分类号 G03B27/54
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